제목2
차세대 Solar cell 제조장비인 Damage-Free 건식 식각 설비
Next-Generation Solar Cell Manufacturing Tool
- 고객 요구에 부합하는 Dry etcher 및 PR Asher 제작
- 신규 개발 공정 및 신 물질의 전문 Tools 개발
- 제조 현장의 특수 공정 및 특수 사양 Tools 개발
- 반도체 Fab의 교육용 설비 제작
- Solar cell 사업 건식. 습식 식각 설비 제작
- Design and manufacture of Dry Etchers and PR Ashers tailored to customer requirements
- Development of specialized tools for new processes and emerging materials
- Production of tools for unique processes and custom specifications in semiconductor manufacturing sites
- Fabrication of training equipment for semiconductor fabs
- Design and manufacture of dry and wet etching systems for solar cell applications
Specification
- Model : PETRA-SE
- Process : Nitride, a-Si
- Wafer & Cassette Type : Solar(M6/M10/M12), 25slot
- Wafer Transfer : VCE, Robot with Single Arm, Wafer Aligner
- Source : Remote Plasma System with Smart Matcher
- Gas Box : Welded Gas Box with 6 sticks for Reaction
- Chuck Temp Control : Sing Type Chiller (0 ~ 60℃)
- Pressure Control : Automatic Pressure Control with Integrated
Advantage
- Likely wet etching performance by Remote Plasma Source(RPS)
- Uniform etch to undamaged surface of the water
- Simple etch chemistry
| 구분 | 특징 |
|---|---|
| Solar cell Etcher |
태양광 연구 센터 Solar cell Etcher 개발 평가결과 iVoc 에서 우수한 효과 검증 |
| Section | Feature |
|---|---|
| Solar cell Etcher | Developed a Solar Cell Etcher at the Photovoltaic Research Center Demonstrated excellent performance in iVoc evaluation results |